Dr. Steven L. Prins
at Texas Instruments Inc
SPIE Involvement:
Publications (15)

Proceedings Article | 20 March 2018 Paper
Can Duan, Scott Jessen, David Ziger, Mizuki Watanabe, Steve Prins, Chi-Chien Ho, Jing Shu
Proceedings Volume 10587, 1058718 (2018) https://doi.org/10.1117/12.2297219
KEYWORDS: Source mask optimization, Lithography, Photomasks, Scanners, Optical proximity correction, Semiconducting wafers, Silicon, Optical lithography

Proceedings Article | 3 April 2010 Paper
Proceedings Volume 7641, 76410A (2010) https://doi.org/10.1117/12.848350
KEYWORDS: Metals, Double patterning technology, Photomasks, Etching, Optical lithography, Semiconducting wafers, Lithography, Scanning electron microscopy, Optical proximity correction, Fiber optic illuminators

Proceedings Article | 16 March 2009 Paper
Steven Prins, James Blatchford, Oluwamuyiwa Olubuyide, Deborah Riley, Simon Chang, Qi-Zhong Hong, T. Kim, Ricardo Borges, Li Lin
Proceedings Volume 7275, 72750C (2009) https://doi.org/10.1117/12.814947
KEYWORDS: Transistors, Data modeling, Lithography, Process modeling, Computer simulations, Logic, 3D modeling, Device simulation, Manufacturing, Resolution enhancement technologies

Proceedings Article | 13 March 2009 Paper
Proceedings Volume 7275, 72750D (2009) https://doi.org/10.1117/12.814197
KEYWORDS: Metals, Lithography, Photomasks, Optical lithography, Logic, Raster graphics, Resolution enhancement technologies, Computer simulations, Distributed computing, Visualization

Proceedings Article | 17 March 2008 Paper
Proceedings Volume 6925, 692518 (2008) https://doi.org/10.1117/12.772685
KEYWORDS: Optical proximity correction, Semiconducting wafers, SRAF, Lithography, Photomasks, Optical lithography, Lithographic illumination, Image segmentation, Manufacturing, Fiber optic illuminators

Showing 5 of 15 publications
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