Dr. Steven M. Thornberg
at Sandia National Labs
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | May 5, 2010
Proc. SPIE. 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II
KEYWORDS: Microelectromechanical systems, Gold, Sensors, Silicon, Adsorption, Aluminum, Chemical analysis, Explosives, Semiconducting wafers, Micro optical fluidics

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
KEYWORDS: Microelectromechanical systems, Statistical analysis, Calibration, Metals, Gases, Nitrogen, Reliability, Transistors, Helium, Carbon monoxide

PROCEEDINGS ARTICLE | December 23, 2003
Proc. SPIE. 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III
KEYWORDS: Microelectromechanical systems, Microsystems, Ions, Silicon, Gases, Reliability, Aluminum, Chemical analysis, Sodium, Pulmonary function tests

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