Steven R. Young
at Motorola Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 3 May 2007 Paper
Proc. SPIE. 6533, 23rd European Mask and Lithography Conference
KEYWORDS: Lithography, Electron beams, Silica, Etching, Chromium, Atomic force microscopy, Scanning electron microscopy, Photomasks, Nanoimprint lithography, Liquids

Proceedings Article | 23 March 2006 Paper
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Opacity, Etching, Quartz, Image processing, Chromium, Atomic force microscopy, Scanning electron microscopy, Photomasks, Semiconducting wafers

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Oxides, Lithography, Etching, Quartz, Silicon, Scanning electron microscopy, Printing, Photomasks, Critical dimension metrology, Semiconducting wafers

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