Dr. Suat Ayoz
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Capacitors, Metals, Capacitance, Electromagnetism, Yield improvement, Electromagnetic simulation, Inductance, Electromechanical design, Advanced distributed simulations

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