Dr. Suchit Bhattarai
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Scattering, Scanning electron microscopy, Extreme ultraviolet, Monte Carlo methods, Extreme ultraviolet lithography, Electron microscopes, Chemistry, Photoresist materials, Quantum efficiency, Spectroscopy, Energy efficiency, Solids, Ranging, Chemically amplified resists, Lithography

Proceedings Article | 25 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Electrons, Scattering, Extreme ultraviolet, Dielectrics, Spectroscopy, Electron microscopes, Absorption, Phonons, Data modeling, Reflectometry, Optical testing, Reflectance spectroscopy, Solids

Proceedings Article | 6 April 2015 Paper
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Line edge roughness, Calibration, Extreme ultraviolet, Quenching (fluorescence), Photons, Point spread functions, Stochastic processes, Data modeling, Systems modeling, Lithography

Proceedings Article | 16 March 2015 Paper
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Line edge roughness, Extreme ultraviolet, Absorption, Extreme ultraviolet lithography, Electron beam lithography, Plasmons, Lithography, Photons, Photomasks, Spectroscopy

Proceedings Article | 28 July 2014 Paper
Proc. SPIE. 9256, Photomask and Next-Generation Lithography Mask Technology XXI
KEYWORDS: Photomasks, Extreme ultraviolet, Speckle, Line width roughness, Inspection, Atomic force microscopy, Lithography, Scattering, Scatter measurement, Line edge roughness

Showing 5 of 9 publications
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