Prof. Sudhir Chandra
at Indian Institute of Technology Delhi
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 20 December 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Etching, Sputter deposition, Silicon, Diffusion, Resistance, Silicon films, Diodes, Phosphorus, Semiconducting wafers, Polysomnography

Proceedings Article | 31 March 2006
Proc. SPIE. 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Microelectromechanical systems, Etching, Sputter deposition, Dielectrics, Silicon, Silicon films, Antennas, Microwave radiation, Ka band, Semiconducting wafers

Proceedings Article | 16 April 1998
Proc. SPIE. 3321, 1996 Symposium on Smart Materials, Structures, and MEMS
KEYWORDS: Microelectromechanical systems, Annealing, Low pressure chemical vapor deposition

Proceedings Article | 16 April 1998
Proc. SPIE. 3321, 1996 Symposium on Smart Materials, Structures, and MEMS
KEYWORDS: Oxides, Capacitors, Etching, Electrodes, Interfaces, Silicon, Capacitance, Molybdenum, Anisotropic etching, Electrochemical etching

Proceedings Article | 2 September 1997
Proc. SPIE. 3226, Microelectronic Structures and MEMS for Optical Processing III
KEYWORDS: Microelectromechanical systems, Annealing, Dielectrics, Silicon, Boron, Low pressure chemical vapor deposition, Micromachining, Wafer bonding, Surface micromachining

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