Dr. Sudip Mukhopadhyay
Lead Scientist at Honeywell Electronic Materials
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, FT-IR spectroscopy, Optical lithography, Optical properties, Polymers, Dielectrics, Chemistry, Resistance, Photoresist materials, Bottom antireflective coatings

Proceedings Article | 4 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Optical lithography, Etching, Silicon, Chemistry, Reflectivity, Photoresist materials, Wet etching, Plasma etching, Photoresist processing, Plasma

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