Ms. Suheil Zaatri Profile

Suheil Zaatri

Engineering Manager at Intel Corp

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Publications (2)

Proceedings Article | 30 September 2009 Paper

Aerial image based die-to-model inspections of advanced technology masks

Jun Kim, Wei-Guo Lei, Joan McCall, Suheil Zaatri, Michael Penn, Rajesh Nagpal, Lev Faivishevsky, Michael Ben-Yishai, Udy Danino, Aviram Tam, Oded Dassa, Vivek Balasubramanian, Tejas Shah, Mark Wagner, Shmoolik Mangan

Proc. SPIE. 7488, Photomask Technology 2009

KEYWORDS: Wafer-level optics, Defect detection, Detection and tracking algorithms, Data modeling, Scanners, Inspection, Transform theory, Photomasks, Semiconducting wafers, Airborne remote sensing

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Proceedings Article | 23 September 2009 Paper

Deployment of OASIS.MASK (P44) as direct input for mask inspection of advanced photomasks

Suheil Zaatri, Yan Liu, Michael Asturias, Joan McCall, Wei-Guo Lei, Tsafi Lapidot, Khen Ofek, Aviram Tam, Mark Wagner, Amanda Bowhill, Emile Sahouria, Minyoung Park, Neil DeBella, Pradiptya Ghosh, Steffen Schulze

Proc. SPIE. 7488, Photomask Technology 2009

KEYWORDS: Metrology, Manufacturing, Inspection, Computer simulations, Data processing, Photomasks, Data conversion, Semiconducting wafers, Standards development, Vestigial sideband modulation

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