Suhyeong Choi
at KAIST
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 30 March 2017 Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Data modeling, Etching, Metals, Image processing, Resistance, Computer simulations, 3D modeling, Artificial neural networks, Machine learning, Photoresist processing, Standards development, 3D image processing

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Etching, Metals, Dielectrics, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Immersion lithography, Source mask optimization, Optical proximity correction, Line edge roughness

Proceedings Article | 24 March 2017 Paper
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Lithography, Etching, Metals, Dielectrics, Monte Carlo methods, Bridges, Photomasks, Extreme ultraviolet lithography, Source mask optimization, Optical proximity correction

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Metals, Raster graphics, Bessel functions

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