Suigen Kyoh
at KIOXIA Corp
SPIE Involvement:
Publications (33)

Proceedings Article | 17 March 2015 Paper
Takaya Matsushita, Takanori Matsumoto, Hidefumi Mukai, Suigen Kyoh, Kohji Hashimoto
Proceedings Volume 9428, 942807 (2015)
KEYWORDS: Etching, Silicon, Critical dimension metrology, Silica, Double patterning technology, Optical lithography, Photomasks, Plasma, Scanning electron microscopy, Dry etching

Proceedings Article | 8 April 2011 Paper
Proceedings Volume 7969, 79691L (2011)
KEYWORDS: Extreme ultraviolet lithography, Manufacturing, Reactive ion etching, Extreme ultraviolet, Lithography, Lithographic illumination, Semiconducting wafers, Yield improvement, Semiconductors, Photoresist processing

Proceedings Article | 4 April 2011 Paper
Proceedings Volume 7974, 79740G (2011)
KEYWORDS: Tolerancing, Manufacturing, Design for manufacturability, Integrated circuit design, Electronic design automation, Data conversion, Optical proximity correction, Data processing, Lithography, Critical dimension metrology

Proceedings Article | 23 March 2011 Paper
Hiroshi Nomura, Masanori Takahashi, Suigen Kyoh
Proceedings Volume 7973, 79731O (2011)
KEYWORDS: Polarization, Lithography, Lithographic illumination, Jones vectors, Polarimetry, Mueller matrices, Jones calculus, Jones matrices, Calculus, Polarizers

SPIE Journal Paper | 1 January 2011
JM3, Vol. 10, Issue 1, 013020, (January 2011)
KEYWORDS: Manufacturing, Tolerancing, Optical proximity correction, Design for manufacturability, Failure analysis, Optics manufacturing, Capacitance, Optical calibration, Clocks, Lithography

Showing 5 of 33 publications
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