Dr. Lakshminarayanan Sujatha Profile

Dr. Lakshminarayanan Sujatha

Professor at Rajalakshmi Engineering College

SPIE Involvement:

Author

Area of Expertise:

MEMS , MEMS pressure sensors , Chemical sensors , MEMS actuators

Publications (8)

Proceedings Article | 16 March 2023 Poster + Paper

Fabrication and characterization of the surface acoustic wave (SAW) based hydrogen sensor

Suganya A., Sujatha L., Girija K. G.

Proceedings Volume 12422, 124220Y (2023) https://doi.org/10.1117/12.2651065

KEYWORDS: Hydrogen, Sensors, Palladium, Acoustic waves, Frequency response, Lithium niobate, Fabrication, Signal attenuation, Sensing systems, Microelectromechanical systems

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Proceedings Article | 6 March 2023 Poster + Paper

Study of different membrane shapes for integrated pneumatically actuated microvalves with PDMS

Kavitha Ravi, Sujatha Lakshminarayanan, Madhankumar P.

Proceedings Volume 12374, 123740A (2023) https://doi.org/10.1117/12.2651178

KEYWORDS: Microfluidics, Polydimethylsiloxane, Protactinium, Reliability, Materials properties, Design and modelling, Switching, Shape analysis, Diagnostics, Biomedical applications

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SPIE Journal Paper | 4 October 2013 Open Access

Errata: Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers

Lakshminarayanan Sujatha, Siddhartha Murali, Saravanan Mani, Selvakumar Subramani

JM3, Vol. 12, Issue 04, 049801, (October 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.4.049801

KEYWORDS: Silicon, Microelectromechanical systems

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SPIE Journal Paper | 25 September 2013

Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers

Sujatha Lakshminarayanan, Siddhartha Murali, Saravanan Mani, Selvakumar Subramani

JM3, Vol. 12, Issue 03, 033020, (September 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.3.033020

KEYWORDS: Silicon, Microelectromechanical systems, Actuators, Resistance, Connectors, Photomasks, Video, Semiconductors, Oxides, Electronics

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Proceedings Article | 5 February 2010 Paper

Mitigating the irreversible deformation with pressure in silicon/porous silicon composite membranes

L. Sujatha, Rahul Goswami, Enakshi Bhattacharya

Proceedings Volume 7592, 75920W (2010) https://doi.org/10.1117/12.846480

KEYWORDS: Composites, Silicon, Coating, Picosecond phenomena, Sensors, Self-assembled monolayers, Microelectromechanical systems, Etching, Electrochemical etching, Reliability

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SPIE Journal Paper | 1 July 2009

Critical study of high-sensitivity pressure sensors with silicon/porous silicon composite membranes

L. Sujatha, Vishwas Kale, Enakshi Bhattacharya

JM3, Vol. 8, Issue 03, 033070, (July 2009) https://doi.org/10.1117/12.10.1117/1.3213252

KEYWORDS: Composites, Sensors, Picosecond phenomena, Silicon, Humidity, Crystals, Semiconducting wafers, Microelectromechanical systems, Scanning electron microscopy, Metals

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Proceedings Article | 26 February 2008 Paper

Sensitivity and stress effects of composite membranes with micro/macro porous silicon for pressure sensor applications

L. Sujatha, Enakshi Bhattacharya

Proceedings Volume 6882, 68820H (2008) https://doi.org/10.1117/12.762868

KEYWORDS: Composites, Silicon, Picosecond phenomena, Sensors, Crystals, Microelectromechanical systems, Scanning electron microscopy, Profilometers, Metals, Semiconducting wafers

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Proceedings Article | 12 February 2007 Paper

Silicon/porous silicon composite membrane for high-sensitivity pressure sensor

L. Sujatha, Enakshi Bhattacharya

Proceedings Volume 6464, 64640O (2007) https://doi.org/10.1117/12.698278

KEYWORDS: Picosecond phenomena, Silicon, Composites, Sensors, Resistors, Crystals, Photomasks, Oxides, Semiconducting wafers, Etching

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Showing 5 of 8 publications

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