As the largest defense company in Turkey, ASELSAN A.S. pioneers the development of high performance electro-optical systems. Starting from 2014, significant progress has been made for the mid-wave infrared (MWIR) HgCdTe detector technology including development of Cadmium Zinc Telluride (CZT) substrate, Mercury Cadmium Telluride (MCT) growth and focal plane array (FPA) fabrication as well as Readout Integrated Circuit (ROIC) design. In this paper, recent process optimization studies on MWIR MCT detector technology are presented. p-on-n MWIR MCT layers with Cadmium (Cd) composition of ~0.3 are used for the FPA fabrication. 640x512/15 µm FPAs, which demonstrate the state-of-the-art performances, have been fabricated. Typically, over 99.0% operability and less than 25 mK Noise Equivalent Temperature Difference (NETD) values are attained with a cut-off wavelength of 5 µm at 77K. Among these remarkable results, major improvements have been recorded in pixel uniformity, reliability and reproducibility by revisiting process steps. As a result, process yield has been considerably increased.
ASELSAN A.S., the largest defense company in Turkey, initiated research activities on developing Mercury Cadmium Telluride (MCT) detectors in 2014. These research activities include bulk crystal growth and surface preparation of Cadmium Zinc Telluride (CZT) substrates, Molecular Beam Epitaxial (MBE) growth of MCT layers, MCT detector fabrication, Read-Out-Integrated-Circuit (ROIC) design and detector-dewar-cooler (DDCA) assembly development. Focal plane arrays with resolutions/pixel pitches of 320x256/30 μm and 640x512/15 μm are fabricated. Noise Equivalent Temperature Difference (NETD) of 320x256 FPA is 11 mK (f#/1.5, 77K) while the operability is 98.2%. 640x512 FPA provides NETD of 32 mK (f#/1.5, 77K) and the operability is 93.2%.
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