Suleyman Turgut
Director of Sales at Luminit LLC
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 22, 1995
Proc. SPIE. 2439, Integrated Circuit Metrology, Inspection, and Process Control IX
KEYWORDS: Gold, Optical components, Polarization, Metals, Silicon, Chromium, Optical testing, Aluminum, Excimer lasers, Excimers

PROCEEDINGS ARTICLE | May 17, 1994
Proc. SPIE. 2197, Optical/Laser Microlithography VII
KEYWORDS: Lithography, Fabry–Perot interferometers, Polymethylmethacrylate, Silica, Etching, Projection systems, Photomasks, Excimer lasers, Plasma etching, Phase shifts

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