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Sun Chen
at Siemens EDA
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Publications (1)
Proceedings Article | 23 March 2020 Paper
Fast OPC repair flow based on machine learning
Bailing Shi, Rock Deng, Zhongli Shu, Yu Zhu, Yuanying Tu, Sun Chen
Proceedings Volume 11328, 113281B (2020) https://doi.org/10.1117/12.2552731
KEYWORDS: Optical proximity correction, Machine learning, Data modeling, Metals, Semiconductor manufacturing, Semiconductors, SRAF, General applications engineering
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