Sunao Aoki
at Sony Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 31, 2009
Proc. SPIE. 7505, Optical Data Storage 2009
KEYWORDS: Microelectromechanical systems, Actuators, Monochromatic aberrations, Mirrors, Silicon, Reflectivity, Deformable mirrors, Silicon films, Objectives, Semiconducting wafers

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