Mr. Sung-Gyu Lee
at Hanyang Univ
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | October 26, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Graphene, Pellicles, Finite element methods, Extreme ultraviolet, Extreme ultraviolet lithography, Silicon carbide

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Silica, Silicon, Manufacturing, Pellicles, Finite element methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Silicon carbide, Ruthenium

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Cooling systems, Silicon, Hydrogen, Pellicles, Finite element methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Convection, Radiation effects

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Refractive index, Deep ultraviolet, Polarization, Silicon, Inspection, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium

SPIE Journal Paper | October 12, 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Pellicles, Particles, Extreme ultraviolet, Critical dimension metrology, Extreme ultraviolet lithography, Photomasks, Distortion, Chromium, Scanners, High volume manufacturing

SPIE Journal Paper | October 7, 2015
JM3 Vol. 14 Issue 04
KEYWORDS: Extreme ultraviolet, Pellicles, Reflectivity, Extreme ultraviolet lithography, Semiconducting wafers, Radiation effects, Deep ultraviolet, Photomasks, Silicon carbide, Mirrors

Showing 5 of 8 publications
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