Sung-Gyu Lee
at Hanyang Univ
SPIE Involvement:
Author
Publications (12)

PROCEEDINGS ARTICLE | November 7, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Hydrogen, Pellicles, Finite element methods, Extreme ultraviolet, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | October 11, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Wafer-level optics, Lithography, Optical lithography, Reflectivity, Finite element methods, Infrared radiation, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, EUV optics

PROCEEDINGS ARTICLE | October 9, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Lithography, Optical lithography, Contamination, Particles, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Applied physics

PROCEEDINGS ARTICLE | March 22, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Multilayers, Image processing, Nickel, Computer simulations, Finite element methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Tantalum, Semiconducting wafers

PROCEEDINGS ARTICLE | October 26, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Graphene, Pellicles, Finite element methods, Extreme ultraviolet, Extreme ultraviolet lithography, Silicon carbide

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Cooling systems, Silicon, Hydrogen, Pellicles, Finite element methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Convection, Radiation effects

Showing 5 of 12 publications
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