Holographic lithography provides a highly compatible and facile way to fabricate multi-dimensional periodic
nanostructures. Periodic nanostructures have useful applications not only as biological substrates or catalytic supports
but also as nanophotonic devices with various photonic properties such as photonic band-gap (PBG), localized surface
plasmon resonance (LSPR) or surface enhanced Raman scattering (SERS). In combination with single refracting prism
holographic lithography and conventional photolithography, we could achieve the micrometer-scale patterns of periodic
nanostructures which can be integrated in microfluidic chip. With the help of conventional MEMS technologies, Arrays
of pyramid shape and top-cut pyramid shape microprism can be prepared. Single laser exposure step through the
microprism arrays (MPAs) can be generate multiscale patterns of 2D and 3D nanostructures. As prepared nanostructures
combined with microfluidic chip is a highly efficient optofluidic platform which is applicable to the chemical and biosensors.
Holographic lithography is one of the promising techniques that can create three-dimensional (3D) periodic
nanostructures without extensive lithography and etching steps. This proceeding discusses novel hybrid lithographic
methods based on the holographic lithography in conjunction with photolithography to generate hierarchically-patterned
structures. Using various types of photoresists including positive, negative and hydrogel, we fabricated 3D nanopatterns
by holographic lithography. Then, two-dimensional (2D) photolithography was combined to pattern the 3D structures.
Eventually, we created a microfluidic channel with 3D periodic patterns. Since the 3D structure possess photonic
bandgap properties as well as interconnected pore networks, this kind of microfluidic channel can be applied to optical
sensors, mixers and filters.