Dr. Sung-Hae Jung
at ETRI
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 9, 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Sensors, Etching, Electrodes, Resistance, Capacitance, Deep reactive ion etching, Bulk micromachining

PROCEEDINGS ARTICLE | July 29, 2004
Proc. SPIE. 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Gold, Electronics, Etching, Gallium arsenide, Coating, Sapphire, Antennas, Local area networks, Prototyping, Nanolithography

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