Dr. Sung-Ho Lee
at AIST
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | November 13, 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Actuators, Ferroelectric materials, Etching, Electrodes, Silicon, Platinum, Silicon films, Wet etching, Reactive ion etching, Semiconducting wafers

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