Dr. Sung-Hoon Jang
Student at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (12)

Proceedings Article | 5 April 2011 Paper
Proceedings Volume 7969, 79690S (2011) https://doi.org/10.1117/12.880230
KEYWORDS: Optical proximity correction, Extreme ultraviolet, Photomasks, Reticles, Extreme ultraviolet lithography, 193nm lithography, Lithography, Manufacturing, Optical lithography, Model-based design

Proceedings Article | 23 March 2011 Paper
Proceedings Volume 7973, 79732F (2011) https://doi.org/10.1117/12.879604
KEYWORDS: Photomasks, Cadmium, Artificial intelligence, Optical proximity correction, Semiconducting wafers, Performance modeling, Neodymium, Data modeling, Error analysis, Statistical modeling

Proceedings Article | 4 March 2008 Paper
Sung-Hoon Jang, Jee-Hyong Lee, Byoung-Sup Ahn, Won-Tai Ki, Ji-Hyeon Choi, Sang-Gyun Woo, Han-Ku Cho
Proceedings Volume 6925, 69250W (2008) https://doi.org/10.1117/12.771771
KEYWORDS: Data conversion, Neural networks, Photomasks, Data modeling, Statistical analysis, Error analysis, Neurons, Statistical modeling, Explosives, Artificial intelligence

Proceedings Article | 14 November 2007 Paper
Ju-Mi Bang, Issei Masumoto, Min-Kyu Ji, Sung-Hoon Jang, Isao Aburatani, Ji-Hyun Choi, Sang-Gyun Woo, Han-Ku Cho
Proceedings Volume 6730, 67302F (2007) https://doi.org/10.1117/12.746349
KEYWORDS: SRAF, Photomasks, Critical dimension metrology, Manufacturing, Printing, Lithography, Inspection, Mask making, Control systems, Semiconductors

Proceedings Article | 21 May 2007 Paper
Min-Kyu Ji, Sung-Hoon Jang, Sung-Jun Son, Ji-Hyeun Choi, Sang-Gyun Woo, Han-Ku Cho
Proceedings Volume 6607, 66070V (2007) https://doi.org/10.1117/12.728945
KEYWORDS: Photomasks, Inspection, SRAF, Data conversion, Manufacturing, Optical proximity correction, Error analysis, Resolution enhancement technologies, Defect inspection, Electronics

Showing 5 of 12 publications
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