Dr. Sunghoon Lee
Senior Researcher at Samsung Advanced Institute of Technology (SAIT)
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | August 20, 2015
Proc. SPIE. 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII
KEYWORDS: Diffraction, Mirrors, Holography, Waveguides, Glasses, Atomic force microscopy, Scanning electron microscopy, Photoresist materials, Collimation, Diffraction gratings

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Electron beam lithography, Cadmium, Modulation, Scattering, Error analysis, Monte Carlo methods, Photomasks, Critical dimension metrology, Vestigial sideband modulation, Chemically amplified resists

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