Dr. Sung-Hwan Yoon
Graduate Student at Univ of Massachusetts/Lowell
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 23, 2006
Proc. SPIE. 6380, Smart Medical and Biomedical Sensor Technology IV
KEYWORDS: Electron beam lithography, Polymers, Silicon, Manufacturing, Surface roughness, Atomic force microscopy, Scanning electron microscopy, Solids, Digital video discs, Semiconducting wafers

PROCEEDINGS ARTICLE | May 16, 2005
Proc. SPIE. 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Electron beam lithography, Titanium, Polymers, Metals, Gallium arsenide, Silicon, Coating, Surface roughness, Scanning electron microscopy, Semiconducting wafers

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