Prof. Sung Il Ahn
at Pohang Univ of Science and Technology
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 31 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Photoresist materials, Interfaces, Reflectivity, Molecules, X-rays, Polymers, Molecular interactions, Polymer thin films, Lithography, Thin films

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: X-rays, Reflectivity, Glasses, Line width roughness, Extreme ultraviolet lithography, Lithography, Extreme ultraviolet, Chemical analysis, Molecular interactions, Polymers

Proceedings Article | 11 April 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Photoresist materials, Diffusion, Atomic force microscopy, Immersion lithography, Polymers, Line edge roughness, Polymer thin films, Water, Edge roughness, Absorption

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