Sung-Keun Lee
at Pohang Univ of Sci and Tech
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 2 October 2001
Proc. SPIE. 4561, MOEMS and Miniaturized Systems II
KEYWORDS: Gold, Microlens array, Polymethylmethacrylate, Glasses, X-rays, Silicon, Photoresist materials, Microlens, Photomasks, Convection

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