Sung-Yong Cho
Senior Engineer at SAMSUNG Advanced Institute of Technology
SPIE Involvement:
Publications (6)

Proceedings Article | 17 October 2008 Paper
Kyung-Yoon Bang, Jin-Back Park, Jeong-Hun Roh, Dong-Hoon Chung, Sung-Yong Cho, Yong-Hoon Kim, Sang-Gyun Woo, Han-Ku Cho
Proceedings Volume 7122, 71222V (2008)
KEYWORDS: Critical dimension metrology, Chromium, Scatterometry, Ultraviolet radiation, Scanning electron microscopy, Optical testing, Scatter measurement, Atomic force microscopy, Process control, Binary data

Proceedings Article | 20 October 2006 Paper
Sung-yong Cho, Sanjay Yedur, Michael Kwon, Milad Tabet
Proceedings Volume 6349, 63492I (2006)
KEYWORDS: Scatterometry, Extreme ultraviolet, Critical dimension metrology, Scanning electron microscopy, Metrology, Photomasks, Etching, EUV optics, Scatter measurement, Inspection

Proceedings Article | 28 August 2003 Paper
Sung-Yong Cho, Won-Suk Ahn, Won-Il Cho, Moon-Gyu Sung, Yong-Hoon Kim, Sung-Woon Choi, Hee-Sun Yoon, Jung-Min Sohn
Proceedings Volume 5130, (2003)
KEYWORDS: Particles, Inspection, Dry etching, Photomasks, Reticles, Manufacturing, Critical dimension metrology, Scanning electron microscopy, Etching, Chromium

Proceedings Article | 27 December 2002 Paper
Proceedings Volume 4889, (2002)
KEYWORDS: Particles, Inspection, Photomasks, Reticles, Dry etching, Manufacturing, Defect inspection, Scanning electron microscopy, Atomic force microscopy, Quartz

Proceedings Article | 11 March 2002 Paper
Proceedings Volume 4562, (2002)
KEYWORDS: Etching, Chromium, Critical dimension metrology, Photomasks, Oxygen, Plasma etching, Dry etching, Mask making, Plasma, Optical proximity correction

Showing 5 of 6 publications
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