Dr. Sung Q. Lee
at Electronics and Telecommunications Res Institute
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 19 October 2006
Proc. SPIE. 6374, Optomechatronic Actuators, Manipulation, and Systems Control
KEYWORDS: Microelectromechanical systems, Oxides, Sensors, Etching, Silicon, Scanning electron microscopy, Finite element methods, Aluminum, Acoustics, Semiconducting wafers

Proceedings Article | 19 October 2006
Proc. SPIE. 6374, Optomechatronic Actuators, Manipulation, and Systems Control
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Electrodes, Crystals, Silicon, Plasma etching, Chlorine, Acoustics, Prototyping

Proceedings Article | 19 October 2006
Proc. SPIE. 6374, Optomechatronic Actuators, Manipulation, and Systems Control
KEYWORDS: Fabrication, Optical lithography, Etching, Crystals, Near field scanning optical microscopy, Near field, Ion beams, Microlens, Optical storage, Near field optics

Proceedings Article | 25 October 2004
Proc. SPIE. 5602, Optomechatronic Sensors, Actuators, and Control
KEYWORDS: Actuators, Ferroelectric materials, Digital signal processing, Visualization, Imaging systems, Sensors, Control systems, Zirconium, Fused quartz, Lead

Proceedings Article | 25 October 2004
Proc. SPIE. 5602, Optomechatronic Sensors, Actuators, and Control
KEYWORDS: Actuators, Spindles, Data storage, Magnetism, Head, Finite element methods, Optical tracking, Holmium, Optical storage, Chemical oxygen iodine lasers

Showing 5 of 10 publications
Conference Committee Involvement (3)
Optomechatronic Actuators and Manipulation II
1 October 2006 | Boston, Massachusetts, United States
Optomechatronic Actuators and Manipulation
5 December 2005 | Sapporo, Japan
Optomechatronic Sensors, Actuators, and Control
25 October 2004 | Philadelphia, Pennsylvania, United States
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