Dr. SungEun Hong
at EMD Performance Materials Corp
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 7 April 2017
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Oxides, Optical lithography, Contamination, Etching, Metals, Silicon, Reflectivity, Photomasks, System on a chip, Plasma

SPIE Journal Paper | 17 August 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Directed self assembly, Polymethylmethacrylate, Atomic force microscopy, Critical dimension metrology, System on a chip, Optical lithography, Semiconducting wafers, Etching, Silicon, Photomasks

Proceedings Article | 25 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Optical lithography, Etching, Polymers, Annealing, Silicon, Scanning electron microscopy, Directed self assembly, Line edge roughness, Photomicroscopy, Semiconducting wafers

Proceedings Article | 25 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Silicon, Resistance, Oxygen, Semiconducting wafers

Proceedings Article | 25 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Lithography, Optical lithography, Polymethylmethacrylate, Etching, Materials processing, Atomic force microscopy, Directed self assembly, Critical dimension metrology, Semiconducting wafers, System on a chip, Photoresist developing

Showing 5 of 10 publications
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