Mr. Sungho Kim Profile

Sungho Kim

at SK Hynix Inc

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Publications (3)

Proceedings Article | 15 March 2021 Presentation + Paper

Test pattern extraction for lithography modeling under design rule revisions

Gangmin Cho, Yonghwi Kwon, Pervaiz Kareem, Sungho Kim, Youngsoo Shin

Proceedings Volume 11613, 116130O (2021) https://doi.org/10.1117/12.2583916

KEYWORDS: Lithography, Optical spheres

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Proceedings Article | 22 February 2021 Poster + Paper

Enhancing model accuracy and calibration efficiency with image-based pattern selection using machine learning techniques

Ren-Cheng Sun, Dae-Kwon Kang, Chester Jia, Meng Liu, De-Bao Shao, Young-Seok Kim, Jangho Shin, Mark Simmons, Qian Zhao, Mu Feng, Yiqiong Zhao, Shibing Wang, Sungho Kim, Sungwoo Ko, Shinyoung Kim, Jaeseung Choi, Chanha Park

Proceedings Volume 11613, 116130Y (2021) https://doi.org/10.1117/12.2584692

KEYWORDS: Calibration, Machine learning, Signal processing, Physics, Optical proximity correction, Metrology, Lithography, Computational lithography

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Proceedings Article | 23 March 2020 Paper

SRAF printing prediction using artificial neural network

Yonghwi Kwon, Jinho Yang, Sungho Kim, Cheolkyun Kim, Youngsoo Shin

Proceedings Volume 11327, 113270C (2020) https://doi.org/10.1117/12.2550685

KEYWORDS: SRAF, Pulmonary function tests, Printing, Machine learning, Optical proximity correction, Photomasks, Artificial neural networks, Data modeling, Logic devices, Lithography

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