Dr. Sungseo Cho
Vice President Development at Samsung SDI Chemicals & Electronic Materials
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Electronics, Optical lithography, Image compression, Polymers, Diffusion, Electroluminescence, Photoresist materials, Resolution enhancement technologies, Temperature metrology

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Transparency, Etching, Chemical species, Polymers, Silicon, Photoresist materials, Polymerization, Absorbance, Fluorine

PROCEEDINGS ARTICLE | July 24, 2002
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Oxides, Thin films, Lithography, Etching, Dry etching, Polymers, Resistance, Photoresist materials, Absorbance, Fluorine

PROCEEDINGS ARTICLE | June 23, 2000
Proc. SPIE. 3999, Advances in Resist Technology and Processing XVII
KEYWORDS: Lithography, Switches, Optical lithography, Modulation, Polymers, Nitrogen, Chemistry, Absorbance, Industrial chemicals, Liquids

PROCEEDINGS ARTICLE | June 23, 2000
Proc. SPIE. 3999, Advances in Resist Technology and Processing XVII
KEYWORDS: FT-IR spectroscopy, Imaging systems, Etching, Polymers, Glasses, Image resolution, Photoresist materials, Absorbance, Line edge roughness, Semiconducting wafers

PROCEEDINGS ARTICLE | June 29, 1998
Proc. SPIE. 3333, Advances in Resist Technology and Processing XV
KEYWORDS: Lithography, Etching, Polymers, Resistance, Bioalcohols, Photoresist materials, Polymerization, Photomasks, Absorbance, Photoresist developing

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top