Dr. Sungseo Cho
Vice President Development at Samsung SDI Chemicals & Electronic Materials
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 1 April 2009 Paper
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Electronics, Optical lithography, Image compression, Polymers, Diffusion, Electroluminescence, Photoresist materials, Resolution enhancement technologies, Temperature metrology

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Transparency, Etching, Chemical species, Polymers, Silicon, Photoresist materials, Polymerization, Absorbance, Fluorine

Proceedings Article | 24 July 2002 Paper
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Oxides, Thin films, Lithography, Etching, Dry etching, Polymers, Resistance, Photoresist materials, Absorbance, Fluorine

Proceedings Article | 23 June 2000 Paper
Proc. SPIE. 3999, Advances in Resist Technology and Processing XVII
KEYWORDS: Lithography, Switches, Optical lithography, Modulation, Polymers, Nitrogen, Chemistry, Absorbance, Industrial chemicals, Liquids

Proceedings Article | 23 June 2000 Paper
Proc. SPIE. 3999, Advances in Resist Technology and Processing XVII
KEYWORDS: FT-IR spectroscopy, Imaging systems, Etching, Polymers, Glasses, Image resolution, Photoresist materials, Absorbance, Line edge roughness, Semiconducting wafers

Showing 5 of 6 publications
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