Dr. Sungsoo Suh
Senior Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (23)

Proceedings Article | 5 April 2011 Paper
Proceedings Volume 7974, 79740Y (2011) https://doi.org/10.1117/12.881472
KEYWORDS: Etching, Photomasks, Critical dimension metrology, Personal protective equipment, Performance modeling, Transistors, Control systems, Instrument modeling, Scanning electron microscopy, Calibration

Proceedings Article | 23 March 2011 Paper
Proceedings Volume 7973, 79731L (2011) https://doi.org/10.1117/12.879781
KEYWORDS: Photomasks, Optical proximity correction, Semiconducting wafers, Photovoltaics, Data modeling, Lithography, SRAF, Calibration, Nanoimprint lithography, Resolution enhancement technologies

Proceedings Article | 23 March 2011 Paper
Proceedings Volume 7973, 79731C (2011) https://doi.org/10.1117/12.882814
KEYWORDS: Photomasks, Lithography, Optical proximity correction, Manufacturing, SRAF, Image segmentation, Inverse problems, Optimization (mathematics), Electronics, Electroluminescence

Proceedings Article | 26 May 2010 Paper
Proceedings Volume 7748, 77481T (2010) https://doi.org/10.1117/12.867995
KEYWORDS: SRAF, Photomasks, Image segmentation, Lithography, Control systems, Stereolithography, Critical dimension metrology, Electron beam lithography, Manufacturing, Resolution enhancement technologies

Proceedings Article | 30 September 2009 Paper
Byung-Gook Kim, Sung Soo Suh, Sang Gyun Woo, HanKu Cho, Guangming Xiao, Dong Hwan Son, Dave Irby, David Kim, Ki-Ho Baik
Proceedings Volume 7488, 748812 (2009) https://doi.org/10.1117/12.833572
KEYWORDS: Photomasks, Inspection, Lithography, Manufacturing, SRAF, Optical proximity correction, Image segmentation, Error analysis, Resolution enhancement technologies, Scanning electron microscopy

Showing 5 of 23 publications
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