Sungwoo Ko
Engineer at SK Hynix Inc
SPIE Involvement:
Publications (4)

Proceedings Article | 22 February 2021 Poster + Paper
Proceedings Volume 11613, 116130Y (2021)
KEYWORDS: Calibration, Machine learning, Signal processing, Physics, Optical proximity correction, Metrology, Lithography, Computational lithography

Proceedings Article | 26 March 2019 Presentation + Paper
Young-Seok Kim, SeIl Lee, Zhenyu Hou, Yiqiong Zhao, Meng Liu, Yunan Zheng, Qian Zhao, Daekwon Kang, Lei Wang, Mark Simmons, Mu Feng, Jun Lang, Byoung-Il Choi, Gilbert Kim, Hakyong Sim, Jongcheon Park, Gyun Yoo, JeonKyu Lee, Sung-woo Ko, Jaeseung Choi, Cheolkyun Kim, Chanha Park
Proceedings Volume 10959, 1095913 (2019)
KEYWORDS: Calibration, Metrology, Optical proximity correction, Data modeling, Instrument modeling, Scanning electron microscopy, Time metrology, Neural networks, Semiconducting wafers

Proceedings Article | 31 March 2014 Paper
Proceedings Volume 9052, 90521W (2014)
KEYWORDS: SRAF, Model-based design, Metals, Instrument modeling, Lithography, Logic devices, Optical proximity correction, Shape memory alloys, Logic, Semiconducting wafers

Proceedings Article | 20 May 2006 Paper
Proceedings Volume 6283, 628336 (2006)
KEYWORDS: SRAF, Optical lithography, Photomasks, Optical proximity correction, Resolution enhancement technologies, Lithographic illumination, Lithography, Light sources, Phase shifts, Manufacturing

Conference Committee Involvement (2)
DTCO and Computational Patterning II
27 February 2023 | San Jose, California, United States
DTCO and Computational Patterning
26 April 2022 | San Jose, California, United States
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top