Sungwoo Ko
Engineer at SK Hynix Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 31 March 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Logic, Metals, Logic devices, Optical proximity correction, SRAF, Semiconducting wafers, Model-based design, Shape memory alloys, Instrument modeling

Proceedings Article | 20 May 2006
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Lithography, Light sources, Optical lithography, Lithographic illumination, Manufacturing, Photomasks, Optical proximity correction, SRAF, Resolution enhancement technologies, Phase shifts

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top