Dr. Sung-Woo Lee
R&D Engineer at Synopsys Korea Inc
SPIE Involvement:
Publications (18)

Proceedings Article | 1 October 2013 Paper
Proceedings Volume 8880, 88801U (2013) https://doi.org/10.1117/12.2026140
KEYWORDS: Optical proximity correction, Image quality, Optimization (mathematics), Nanoimprint lithography, Image enhancement, Image processing, Design for manufacturing, Resolution enhancement technologies, Neodymium, Nano opto mechanical systems

Proceedings Article | 12 April 2013 Paper
Jeonkyu Lee, Taehyeong Lee, Sangjin Oh, Chunsoo Kang, Jungchan Kim, Jaeseung Choi, Chanha Park, Hyunjo Yang, Donggyu Yim, Munhoe Do, Irene Su, Hua Song, Jung-Hoe Choi, Yongfa Fan, Anthony Wang, Sung-Woo Lee, Robert Boone, Kevin Lucas
Proceedings Volume 8683, 86830F (2013) https://doi.org/10.1117/12.2012463
KEYWORDS: Optical proximity correction, Lithography, Extreme ultraviolet, Transistors, Critical dimension metrology, Model-based design, 193nm lithography, Cadmium, Photomasks, Optical lithography

Proceedings Article | 23 March 2011 Paper
Proceedings Volume 7973, 79731C (2011) https://doi.org/10.1117/12.882814
KEYWORDS: Photomasks, Lithography, Optical proximity correction, Manufacturing, SRAF, Image segmentation, Inverse problems, Optimization (mathematics), Electronics, Electroluminescence

Proceedings Article | 29 September 2010 Paper
Proceedings Volume 7823, 782311 (2010) https://doi.org/10.1117/12.864528
KEYWORDS: SRAF, Optical proximity correction, Scanning electron microscopy, Calibration, Diffusion, Photomasks, Lithography, Performance modeling, Cadmium sulfide, Critical dimension metrology

Proceedings Article | 22 March 2010 Paper
Jung-Hoon Ser, Tae-Hoon Park, Moon-Gyu Jeong, Eun-Mi Lee, Sung-Woo Lee, Chun-Suk Suh, Seong-Woon Choi, Chan-Hoon Park, Joo-Tae Moon
Proceedings Volume 7640, 76401T (2010) https://doi.org/10.1117/12.848317
KEYWORDS: 3D modeling, Optical proximity correction, Photomasks, Cadmium, Semiconducting wafers, Scanning electron microscopy, Semiconductors, Electronics, Scanners, Lithography

Showing 5 of 18 publications
Conference Committee Involvement (4)
Alternative Lithographic Technologies III
1 March 2011 | San Jose, California, United States
Alternative Lithographic Technologies II
23 February 2010 | San Jose, California, United States
Alternative Lithographic Technologies
24 February 2009 | San Jose, California, United States
Emerging Lithographic Technologies XII
26 February 2008 | San Jose, California, United States
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