Dr. Sungyoon Ryu Profile

Dr. Sungyoon Ryu

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (11)

SPIE Journal Paper | 10 October 2024 Open Access

Detection of defective chips from nanostructures with a high-aspect ratio using hyperspectral imaging and deep learning

Sunhong Jun, Wonjun Choi, Yong-Ju Jeon, Jeongsu Ha, Kyuhwan Kim, Sungyoon Ryu, Myungjun Lee, Yongdeok Jeong, Younghoon Sohn

JM3, Vol. 23, Issue 04, 044002, (October 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.4.044002

KEYWORDS: Intelligence systems, Semiconducting wafers, Etching, Defect detection, Deep learning, Scanning electron microscopy, Nanostructures, Inspection, Hyperspectral imaging, Metrology

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