Dr. Sunil K. Murthy Profile

Dr. Sunil K. Murthy

at Canon Nanotechnologies Inc

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Publications (1)

Proceedings Article | 6 May 2005 Paper

S-FIL technology: cost of ownership case study

Michael Falcon, S. Sreenivasan, Sunil Murthy, Daren Dance

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.599921

KEYWORDS: Optical lithography, Lithography, Semiconducting wafers, Photomasks, Etching, Photoresist processing, Metals, Manufacturing, Optical proximity correction, Copper

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