Sunpyo S. Lee
at SAMUNG Electronics Co Ltd.
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 8, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Optical lithography, Inspection, Image resolution, Photomasks, Artificial intelligence, Source mask optimization, Optical proximity correction, SRAF, Evolutionary algorithms, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 23, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Reticles, Radon, Defect detection, Inspection, Photomasks, Double patterning technology, Ear, Critical dimension metrology, Semiconducting wafers, Defect inspection

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