Sunyoung Koo
Technical Staff/Researcher at SK Hynix Inc
SPIE Involvement:
Publications (18)

Proceedings Article | 5 May 2017 Paper
Proceedings Volume 10143, 101431B (2017)
KEYWORDS: Nanoimprint lithography, Photomasks, Stochastic processes, Diffraction, Extreme ultraviolet lithography, Optical lithography, Lithographic illumination, Scanners, Immersion lithography, Stray light, Extreme ultraviolet, Calibration, Fiber optic illuminators, Contamination

Proceedings Article | 18 March 2016 Paper
Proceedings Volume 9776, 97761Q (2016)
KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Optical lithography, Nanoimprint lithography, Lithographic illumination, Source mask optimization, Resolution enhancement technologies, Line width roughness, Stochastic processes, Scanners, Photomasks, Semiconducting wafers, Lithography, Critical dimension metrology

Proceedings Article | 18 March 2016 Paper
Proceedings Volume 9776, 977623 (2016)
KEYWORDS: Extreme ultraviolet, Manufacturing, Neodymium, Nanoimprint lithography, Extreme ultraviolet lithography, Ions, Source mask optimization, Ultraviolet radiation, Line edge roughness, Optical lithography

Proceedings Article | 6 April 2015 Paper
Yoonsuk Hyun, Jinsoo Kim, Kyuyoung Kim, Sunyoung Koo, SeoMin Kim, Youngsik Kim, Changmoon Lim, Nohjung Kwak
Proceedings Volume 9422, 94221U (2015)
KEYWORDS: Photomasks, Particles, Scanners, Extreme ultraviolet lithography, Semiconducting wafers, Pellicles, Extreme ultraviolet, Inspection, Reticles, Scanning electron microscopy

Proceedings Article | 17 April 2014 Paper
Proceedings Volume 9048, 90480A (2014)
KEYWORDS: Etching, Liquid phase epitaxy, Stochastic processes, Photomasks, Metrology, Critical dimension metrology, Printing, Scanning electron microscopy, Extreme ultraviolet, Error analysis

Showing 5 of 18 publications
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