Susan S. MacDonald
Senior Applications Engineer at Photronics Inc
SPIE Involvement:
Publications (15)

Proceedings Article | 2 April 2014 Paper
Shazad Paracha, Benjamin Eynon, Ben Noyes, Anthony Nhiev, Anthony Vacca, Peter Fiekowsky, Dan Fiekowsky, Young Mog Ham, Doug Uzzel, Michael Green, Susan MacDonald, John Morgan
Proceedings Volume 9050, 905031 (2014)
KEYWORDS: Reticles, Semiconducting wafers, Inspection, Photomasks, Classification systems, Scanning electron microscopy, Critical dimension metrology, Error analysis, Wafer testing, Defect detection

Proceedings Article | 21 March 2006 Paper
Gregory Hughes, Susan MacDonald, John Riddick, Anthony Nhiev, Jason Hickethier
Proceedings Volume 6154, 615446 (2006)
KEYWORDS: Photomasks, Quartz, Inspection, Etching, Printing, Scanning electron microscopy, Lithography, Semiconducting wafers, Chromium, Phase shifts

Proceedings Article | 9 November 2005 Paper
Susan MacDonald, David Mellenthin, Kevin Rentzsch, Kenneth Kramer, James Ellenson, Tim Hostetler, Ron Enck
Proceedings Volume 5992, 599242 (2005)
KEYWORDS: Lithography, Semiconducting wafers, Vestigial sideband modulation, Electron beam lithography, Photomasks, Microelectromechanical systems, Transform theory, Manufacturing, Nanoimprint lithography, Optics manufacturing

Proceedings Article | 8 November 2005 Paper
Proceedings Volume 5992, 59922F (2005)
KEYWORDS: Metals, Etching, Quartz, Copper, Photomasks, Optical lithography, Manufacturing, Lithography, Semiconducting wafers, Dielectrics

Proceedings Article | 12 May 2005 Paper
Proceedings Volume 5754, (2005)
KEYWORDS: Photomasks, Semiconducting wafers, Magnetism, Neck, Manufacturing, Scanning electron microscopy, Phase shifts, Optical proximity correction, Quartz, Distortion

Showing 5 of 15 publications
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