Susan S. MacDonald
Senior Applications Engineer at Photronics Inc
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 2 April 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Reticles, Defect detection, Error analysis, Inspection, Scanning electron microscopy, Photomasks, Critical dimension metrology, Semiconducting wafers, Wafer testing, Classification systems

Proceedings Article | 21 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Lithography, Etching, Quartz, Inspection, Chromium, Scanning electron microscopy, Printing, Photomasks, Semiconducting wafers, Phase shifts

Proceedings Article | 9 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Microelectromechanical systems, Lithography, Electron beam lithography, Manufacturing, Transform theory, Photomasks, Nanoimprint lithography, Semiconducting wafers, Optics manufacturing, Vestigial sideband modulation

Proceedings Article | 8 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Optical lithography, Etching, Quartz, Metals, Copper, Dielectrics, Manufacturing, Photomasks, Semiconducting wafers

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Neck, Quartz, Manufacturing, Magnetism, Distortion, Scanning electron microscopy, Photomasks, Optical proximity correction, Semiconducting wafers, Phase shifts

Showing 5 of 15 publications
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