Susan Walter
at Fraunhofer IKTS-MD
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 17 May 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Ferroelectric materials, Ceramics, Composites, Manufacturing, Ultrasonics, Transducers, Epoxies, Phased arrays, Chemical elements, Acoustics

Proceedings Article | 5 May 2011
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Thin films, Sensors, Ultrasonography, Sputter deposition, Electrodes, Silicon, Ultrasonics, Transducers, Aluminum nitride, Phased arrays

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