Dr. Susanne Arney
Senior Director Enabling Physical Technologies Res at Nokia Bell Labs
SPIE Involvement:
Author | Instructor
Publications (8)

Proceedings Article | 8 February 2008 Paper
Proc. SPIE. 6888, MEMS Adaptive Optics II
KEYWORDS: Spatial light modulators, Adaptive optics, Point spread functions, Microelectromechanical systems, Cameras, Control systems, Electronics, Wavefront sensors, Prototyping, Actuators

Proceedings Article | 24 April 2003 Paper
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Mirrors, Electrodes, Silicon, Microelectromechanical systems, Switches, Reflectors, Semiconducting wafers, Microopto electromechanical systems, Oxides, Optical fabrication equipment

Proceedings Article | 21 November 2001 Paper
Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II
KEYWORDS: Microelectromechanical systems, Resonators, Mars, Acoustics, Inductance, Telecommunications, Modulators, Mirrors, Silicon, Metals

Proceedings Article | 2 October 2001 Paper
Proc. SPIE. 4558, Reliability, Testing, and Characterization of MEMS/MOEMS
KEYWORDS: Microopto electromechanical systems, Reliability, Microelectromechanical systems, Packaging, Telecommunications, Networks, Silicon, Physics, Mechanical engineering, Feedback loops

Proceedings Article | 22 August 2000 Paper
Proc. SPIE. 4178, MOEMS and Miniaturized Systems
KEYWORDS: Mirrors, Electrodes, Reflectors, Micromirrors, Silicon, Singular optics, Single mode fibers, Switching, Free space, Free space optics

Showing 5 of 8 publications
Conference Committee Involvement (15)
MOEMS and Miniaturized Systems XI
24 January 2012 | San Francisco, California, United States
MOEMS and Miniaturized Systems X
24 January 2011 | San Francisco, California, United States
MOEMS and Miniaturized Systems IX
25 January 2010 | San Francisco, California, United States
MOEMS and Miniaturized Systems VIII
27 January 2009 | San Jose, California, United States
MOEMS and Miniaturized Systems VII
22 January 2008 | San Jose, California, United States
Showing 5 of 15 Conference Committees
Course Instructor
SC434: Designing MEMS for Reliability
This course will provide attendees with a basic working knowledge of how to design MEMS for reliability. The course will concentrate on MEMS design, reliability physics, MEMS-specific fundamental reliability phenomena and failure modes, and accelerated testing protocols. Practical and useful examples from various arenas of MEMS application will be provided.
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