Dr. Susumu Iida
Chief specialist at IMEC (Toshiba Memory assignee)
SPIE Involvement:
Author
Area of Expertise:
Lithography , Metrology , Crystal growth , Inspection , Electron beam
Websites:
Profile Summary

Susumu Iida received his BS and MS degrees in 1995 and 1997, respectively, and in 2000, he earned his PhD in engineering, all from Shizuoka University, Japan. He joined the Research and Development Center, Toshiba Corporation, where he carried out research on GaN-based blue laser diodes and the development of patterned mask inspection tools. In 2011, he was assigned to EIDEC, where he engaged in development of EB inspection tool and defect inspection standard technology. In 2019, he was assigned to imec. He is a chief specialist at TOSHIBA Memory Corporation.
Publications (32)

SPIE Journal Paper | 13 September 2019
JM3 Vol. 18 Issue 03

SPIE Journal Paper | 19 June 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Semiconducting wafers, Palladium, Inspection, Standards development, Scanning electron microscopy, Etching, Lithography, Defect detection, Electron beam lithography, Silicon

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Lithography, Metrology, Defect detection, Etching, Silicon, Inspection, Scanning electron microscopy, Line edge roughness, Semiconducting wafers, Standards development

Proceedings Article | 26 March 2019
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Lithography, Lithographic illumination, Scanning electron microscopy, Photomasks, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Line edge roughness, Tantalum, Semiconducting wafers

Proceedings Article | 10 May 2016
Proc. SPIE. 9984, Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Defect detection, Imaging systems, Sensors, Image processing, Inspection, Electron microscopes, Image sensors, Photomasks, Extreme ultraviolet lithography, Defect inspection

Showing 5 of 32 publications
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