Suthamathy Sathananthan
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 7, 2013
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Oxides, Lithography, Electron beam lithography, Optical lithography, Polymethylmethacrylate, Silicon, Photomasks, Tissue engineering, Semiconducting wafers, Natural surfaces

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top