Dr. Sven Burger
at Konrad-Zuse-Zentrum für Informationstechnik Berlin
SPIE Involvement:
Conference Program Committee | Author
Websites:
Publications (81)

Proceedings Article | 21 June 2019
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Oxides, Nanostructures, Sensors, Luminescence, X-rays, Silicon, Finite element methods, Particle swarm optimization, Optimization (mathematics), X-ray fluorescence spectroscopy

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Scattering, Computer simulations, Scatterometry, Inverse problems, Finite element methods, Reconstruction algorithms, Optimization (mathematics), Scatter measurement, Stochastic processes, Inverse optics

Proceedings Article | 26 September 2018
Proc. SPIE. 10745, Current Developments in Lens Design and Optical Engineering XIX
KEYWORDS: Refractive index, Optical design, Optical properties, Scattering, Nanoparticles, Particles, Composites, Magnetism, Mie scattering, Nanocomposites

Proceedings Article | 18 September 2018
Proc. SPIE. 10731, Nanostructured Thin Films XI
KEYWORDS: Thin films, Nanostructuring, Silicon, Numerical simulations, Thin film solar cells, Optical simulations, Nanostructured thin films, Tandem solar cells, Absorption, Perovskite

Proceedings Article | 28 May 2018
Proc. SPIE. 10694, Computational Optics II
KEYWORDS: Optical design, Metrology, Diffractive optical elements, Silicon, Scatterometry, Inverse problems, Finite element methods, Optimization (mathematics), Stochastic processes, Inverse optics

Proceedings Article | 22 May 2018
Proc. SPIE. 10688, Photonics for Solar Energy Systems VII
KEYWORDS: Antireflective coatings, Solar cells, Silicon, Reflectivity, Finite element methods, Tandem solar cells, Absorption, Perovskite

Showing 5 of 81 publications
Conference Committee Involvement (8)
Modeling Aspects in Optical Metrology VII
24 June 2019 | Munich, Germany
Computational Optics 2018
16 May 2018 | Frankfurt, Germany
Modeling Aspects in Optical Metrology
26 June 2017 | Munich, Germany
Modeling Aspects in Optical Metrology V
23 June 2015 | Munich, Germany
Modeling Aspects in Optical Metrology IV
13 May 2013 | Munich, Germany
Showing 5 of 8 published special sections
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