Dr. Swamy V. Muddu
Graduate Student Researcher at
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | March 15, 2012
Proc. SPIE. 8327, Design for Manufacturability through Design-Process Integration VI
KEYWORDS: Lithography, Statistical analysis, Manufacturing, Double patterning technology, Statistical modeling, Astatine, Standards development, 193nm lithography, New and emerging technologies, Design for manufacturability

PROCEEDINGS ARTICLE | May 19, 2008
Proc. SPIE. 7028, Photomask and Next-Generation Lithography Mask Technology XV
KEYWORDS: Lithography, Diffractive optical elements, Data modeling, Error analysis, Diffusion, Computer simulations, Optical proximity correction, Critical dimension metrology, Process modeling, Instrument modeling

SPIE Journal Paper | January 1, 2008
JM3 Vol. 7 Issue 01
KEYWORDS: Optical proximity correction, Critical dimension metrology, SRAF, Lithography, Model-based design, Semiconducting wafers, Resolution enhancement technologies, Standards development, Computer programming, Image processing

PROCEEDINGS ARTICLE | March 14, 2006
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: Lithography, Statistical analysis, Error analysis, Diffusion, Photomasks, Optical proximity correction, Optics manufacturing, Standards development, Instrument modeling, Design for manufacturability

PROCEEDINGS ARTICLE | November 9, 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Data modeling, Manufacturing, Information technology, Optical proximity correction, Optimization (mathematics), Tolerancing, Performance modeling, Resolution enhancement technologies, Image quality standards, Design for manufacturability

PROCEEDINGS ARTICLE | August 28, 2003
Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X
KEYWORDS: Semiconductors, Electron beam lithography, Electron beams, Ions, Distortion, Computer simulations, Photomasks, Critical dimension metrology, Lanthanum, Electrochemical etching

Showing 5 of 7 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top