Swaroop K. Kommera
at Stanford Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 January 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Microelectromechanical systems, Oxides, Optical lithography, Etching, Metals, Silicon, Resistance, Chemical vapor deposition, Semiconducting wafers, Chemical mechanical planarization

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