Dr. Syarhei M. Avakaw
Director at Planar JSC
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 17 May 2019
Proc. SPIE. 11170, 14th National Conference on Laser Technology and Optoelectronics (LTO 2019)
KEYWORDS: Gold, Signal to noise ratio, Photodetectors, Light sources, Cameras, Electrodes, Silicon, Machine vision, Optical instrument design, Absorption

Proceedings Article | 17 May 2019
Proc. SPIE. 11170, 14th National Conference on Laser Technology and Optoelectronics (LTO 2019)
KEYWORDS: Thin films, Refractive index, Lithographic illumination, Polarization, Birefringence, Imaging systems, Wave plates

Proceedings Article | 3 May 2007
Proc. SPIE. 6533, 23rd European Mask and Lithography Conference
KEYWORDS: Prisms, Reticles, Defect detection, Opacity, Sensors, Databases, Inspection, Inspection equipment, Photomasks, Laser systems engineering

Proceedings Article | 21 June 2006
Proc. SPIE. 6281, 22nd European Mask and Lithography Conference
KEYWORDS: Reticles, Optical lithography, Defect detection, Error analysis, Inspection, Distance measurement, Photomasks, Dynamical systems, Factor analysis, Edge roughness

Proceedings Article | 20 May 2006
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Reticles, Optical lithography, Defect detection, Error analysis, Inspection, Distance measurement, Photomasks, Dynamical systems, Factor analysis, Edge roughness

Showing 5 of 9 publications
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