Syed A. Rizvi
SPIE Involvement:
Publications (8)

Proceedings Article | 1 July 2002 Paper
Proceedings Volume 4688, (2002)
KEYWORDS: Molecules, Lithography, Electrons, Semiconductors, Chemical species, Quantum dots, Silicon, Particles, Crystals, Photomasks

Proceedings Article | 14 June 1999 Paper
Proceedings Volume 3677, (1999)
KEYWORDS: Mask making, Diagnostics, Atomic force microscopy, Surface roughness, Atomic force microscope, Image quality, Manufacturing, Phase shifts, Silicon, Semiconducting wafers

Proceedings Article | 14 June 1999 Paper
Proceedings Volume 3677, (1999)
KEYWORDS: Tolerancing, Calibration, Error analysis, Metrology, Fourier transforms, Critical dimension metrology, Reticles, Cadmium, Statistical analysis, Wavelets

Proceedings Article | 18 December 1998 Paper
Syed Rizvi, Nathan Diachun
Proceedings Volume 3546, (1998)
KEYWORDS: Semiconducting wafers, Reticles, Image quality, Photomasks, Metrology, Calibration, Optics manufacturing, Tolerancing, Wafer-level optics, Manufacturing

Proceedings Article | 1 September 1998 Paper
John Petersen, Robert Socha, Alex Naderi, Catherine Baker, Syed Rizvi, Douglas Van Den Broeke, Nishrin Kachwala, J. Fung Chen, Thomas Laidig, Kurt Wampler, Roger Caldwell, Susumu Takeuchi, Yoshiro Yamada, Takashi Senoh, Martin McCallum
Proceedings Volume 3412, (1998)
KEYWORDS: Etching, Optical proximity correction, Diffraction, Photomasks, Reticles, Phase shifts, Quartz, Anisotropic etching, Lithography, Phase measurement

Showing 5 of 8 publications
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